JPS622245U - - Google Patents
Info
- Publication number
- JPS622245U JPS622245U JP9151685U JP9151685U JPS622245U JP S622245 U JPS622245 U JP S622245U JP 9151685 U JP9151685 U JP 9151685U JP 9151685 U JP9151685 U JP 9151685U JP S622245 U JPS622245 U JP S622245U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- plasma
- plasma generating
- generation source
- microwave generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985091516U JPH0447958Y2 (en]) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985091516U JPH0447958Y2 (en]) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622245U true JPS622245U (en]) | 1987-01-08 |
| JPH0447958Y2 JPH0447958Y2 (en]) | 1992-11-12 |
Family
ID=30647476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985091516U Expired JPH0447958Y2 (en]) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0447958Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887825A (ja) * | 1981-11-20 | 1983-05-25 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
-
1985
- 1985-06-19 JP JP1985091516U patent/JPH0447958Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887825A (ja) * | 1981-11-20 | 1983-05-25 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447958Y2 (en]) | 1992-11-12 |